NANOS Specifications


Scan range	20 µm x 20 µm x 3 µm, 40 µm x 40 µm x 4 µm, 80 µm x 80 µm x 5 µm, hardware linearized scan, motion in X-Y-direction (optional in Z-direction)
Noise level	depending on optical microscope, typ. better than 1 nm in acoustic enclosure
Lateral accuracy	typically within 1%, closed loop scanning
Scan speed	typ. 1 to 10 Hz
Detection principle	fiber optic interferometry, noise level < 0.01 nm RMS
Tips	silicon tips, various types
Tip change	adjustment free
Digital input resolution	16 bit A/D
Digital output resolution	16 bit D/A
Output voltage	± 165 V, 2 µV RMS
Input channels	max. 8 simultaneous
Exteral inputs	max. 3 high speed with 16 bit resolution
Image size	freely selectable, from 128 to 1024 pixels, also rectangular sizes
Processing	internal 32 bit DSP, typ. 50 MHz
Computer interface	USB (standard universal serial bus)
Operating system	MS-Windows 2000®, XP